| 000 | 01368nom a2200385 u 4500 | ||
|---|---|---|---|
| 001 | 10070525 | ||
| 003 | upatras | ||
| 005 | 20210117201617.0 | ||
| 008 | 090513s2005 eng | ||
| 020 | _a9783540269458 | ||
| 040 |
_aGR-PaULI _cGR-PaULI |
||
| 041 | 0 | _aeng | |
| 100 | 1 |
_aSchwizer, JΓΌrg _966849 |
|
| 245 | 1 | 0 |
_aForce Sensors for Microelectronic Packaging Applications _h[electronic resource] _cby JΓΌrg Schwizer, Michael Mayer, Oliver Brand |
| 260 |
_aBerlin, Heidelberg _bSpringer-Verlag Berlin Heidelberg _c2005 |
||
| 300 | _bv.: digital | ||
| 490 | 0 |
_aMicrotechnology and MEMS _x1615-8326 |
|
| 650 | 4 |
_aOptical materials _964444 |
|
| 650 | 4 |
_aNanotechnology _919191 |
|
| 650 | 4 |
_aElectronics _915695 |
|
| 650 | 4 |
_aEngineering _917712 |
|
| 650 | 4 |
_aSystem safety _964896 |
|
| 650 | 4 |
_aChemistry _911013 |
|
| 650 | 4 |
_aOptical and Electronic Materials _964446 |
|
| 650 | 4 |
_aNanotechnology _919191 |
|
| 650 | 4 |
_aElectronics and Microelectronics, Instrumentation _964430 |
|
| 650 | 4 |
_aPhysics and Applied Physics in Engineering _964483 |
|
| 650 | 4 |
_aQuality Control, Reliability, Safety and Risk _964898 |
|
| 700 | 1 |
_aMayer, Michael _966850 |
|
| 700 | 1 |
_aBrand, Oliver _966851 |
|
| 760 | 1 |
_aMicrotechnology and MEMS _x1615-8326 |
|
| 856 | 4 | 0 | _uhttp://dx.doi.org/10.1007/b138345 |
| 942 | _2ddc | ||
| 999 |
_c46770 _d46770 |
||